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Zeta-20 white light confocal
Zeta-20 white light confocal
Zeta-20 white light confocal
Zeta-20 white light confocal
Zeta-20 white light confocal

Zeta-20 white light confocal

Zeta-20 is a compact and rugged fully integrated optical contour microscope that provides 3D measurement and imaging capabilities. This system uses ZDot ™ technology, which can simultaneously capture high-resolution 3D data and True Color infinity focus images. The Zeta-20 has a Multi-Mode optical system, easy-to-use software, and low cost of ownership, making it suitable for R & D and production environments.

  • 白光共聚焦显微镜 Product name: White light confocal microscope
  • KLA Brand: KLA
  • Zeta-20 Product model: Zeta-20
  • 美国 Origin: United States

Zeta-20 Optical Profiler

膜厚测量仪|光学轮廓仪|Filmetrics|优尼康|粗糙度测量

* Only one copy, please contact customer service for special needs

Zeta-20 is a compact and rugged fully integrated optical contour microscope that provides 3D measurement and imaging capabilities. This system uses ZDot ™ technology, which can simultaneously capture high-resolution 3D data and True Color infinity focus images. The Zeta-20 has a Multi-Mode optical system, easy-to-use software, and low cost of ownership, making it suitable for R & D and production environments.

product description

Zeta-20 desktop optical profiler is a non-contact 3D surface topography measurement system. This system uses ZDot ™ patented technology (US patents: US7729049B2; US7944609B2; US8174762B2; US8184364B2; US10048480B2) and Multi-Mode optical system, which can measure a variety of different samples: transparent and opaque, low to high Reflectivity, smooth to rough texture, and step heights in the nanometer to millimeter range.

The Zeta-20's configuration is flexible and easy to use, and combines six different optical measurement technologies. ZDot ™ measurement mode captures both high-resolution 3D data and True Color infinity focus images simultaneously. Other 3D measurement techniques include white light interferometry, Nomarski interference contrast microscopy, and shear interferometry. Either ZDot or integrated broadband reflectometer can measure film thickness. Zeta-20 is also a high-end microscope that can be used for sample re-inspection or automatic defect inspection. Zeta-20 is suitable for R & D and production environments by providing comprehensive measurement of step height, roughness and film thickness, and defect detection.

The main function

· Easy-to-use optical profilometer with ZDot and Multi-Mode optics for a wide range of applications

High-quality microscopes for sample re-inspection or defect inspection

· ZDot: simultaneous acquisition of high-resolution 3D data and True Color infinite focus images

· ZXI: White light interferometry technology, suitable for wide area measurement with high z-direction resolution

ZIC: interference contrast, suitable for sub-nanometer roughness surfaces and providing their 3D quantitative data

· ZSI: Shear Interferometry Technology Provides High Resolution Images in Z Direction

· ZFT: Measurement of film thickness and reflectance with integrated broadband reflectometer

· AOI: Automatic optical inspection and quantification of defects on samples

Production capacity: Fully automated measurement through sequencing and pattern recognition


main application

Step height: 3D step height from nanometer to millimeter level

Texture: Roughness and waviness smooth to very rough surfaces

· Shape: 3D warping and shape

· Stress: 2D film stress

Film thickness: 30nm to 100μm transparent film thickness

Defect detection: capture defects larger than 1 μm

Defect re-inspection: Use KLARF file as navigation to measure the 3D surface topography of the defect or the position of the cutting track defect

Industrial applications

· Solar: photovoltaic solar cells

Semiconductors and compound semiconductors

· Semiconductor WLCSP (Wafer Level Chip Scale Package)

· Semiconductor FOWLP (Fan Out Wafer Level Packaging)

PCB and flexible PCB

· MEMS (Micro Electro Mechanical System)

Medical equipment and microfluidic equipment

· data storage

· Universities, research laboratories and institutes

· And more: Please contact us to meet your requirements




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